초저온 3차원 국소원자단층 현미경 (Cryo-APT)
| 사진 |
 |
|---|---|
| 영문명/단축명 |
Cryo-Atom Probe Tomography / Cryo-APT |
| 모델명 |
LEAP 6000 XR |
| 설치장소 | 미세구조분석실 / [82105]APT lab. |
| 제작사 | CAMECA |
| 도입년도/가격 | 2025.02월 / 5,190,260,000 원 |
| 담당자 연락처/e-mail | 031-299-6733 / swsjss@skku.edu |
♦ Features
Atom Probe Tomography (APT) is an advanced high-resolution materials analysis technique capable of 3D imaging and chemical composition analysis at the atomic level. It offers a depth resolution of 0.1–0.3 nm and a lateral resolution of 0.3–0.5 nm. Utilizing field evaporation, APT enables quantitative atomic-scale compositional analysis. It is an essential tool for microstructural research, particularly in atomic cluster analysis, interface characterization, and precise quantification of nanoscale elemental distributions.
♦ Additional Options
• Hardware
(1) Load-Lock chamber (with a separate turbomolecular pump)
(2) Storage / transfer chamber (with a separate turbomolecular pump)
(3) UHV analysis chamber (with an ion pump and a titanium sublimation pump)
(4) Uninterruptible Power Supply (UPS)
(5) Integrated monitoring and logging of all system components
(6) Motorized specimen mounting with controlled cryogenic cooling
(7) Local Electrode stage
(8) HV pulser for working in voltage pulsed mode
(9) Laser pulse module (Deep UV Laser product system)
(10) Proprietary Delay Line Detection system
(11) A fully-integrated, automated plasma cleaner
(12) Vacuum cryo transfer module (VCTM) for transporting under cryogenic and UHV conditions
• Software
(1) Data-acquisition and control PC with preliminary data analysis capabilities
(2) Data processing software (AP Suite)
♦ Specification
• Specification
- Mass resolution (FWHM): 1:1000
- Mass resolution (FWTM): 1:475
- Mass resolution (FW1%M): 1:275
- Maximum Data collection rate (ions/minute): 3 M/min
- Minimum specimen temperature (K): 25 K
♦ Application Data