집속이온빔장치(FIB 2)
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| 단축명 | FIB 2 |
| 모델명 | JIB-4601F |
| 설치장소 | 미세구조분석실//[81B104]집속이온빔(FIB) |
| 제작사 | JEOL.LTD. |
| 도입년도/가격 | 201305 / 1,250,000,000 |
| 담당자 | 김영미(Kim Youngmi) 031-299-6729 |
| 장비용도 | |
| A low-vacuum mode enables SEM observation without any coating of insulating material, so it can be used in almost any field. The FIB can be used for fine milling and TEM thin-film sample preparation. 3-dimensional images can be reconstructed to provide a better understanding of the internal structure of the specimen. | |
| 기본사양 | |
| Ion source : Ga liquid metal ion source, Accelerating voltages : 1 to 30 kV (in 5 kV steps), Image resolution : 5 nm (at 30 kV), Beam current : Up to 60 nA (at 30 kV) | |