이차이온질량분석기
단축명 | SIMS |
---|---|
모델명 | TOF-SIMS-5 |
설치장소 | 표면분석실//[81B110]이차전자질량분석실 |
제작사 | ION-TOF |
도입년도/가격 | 200712 / 1,400,000,000 |
담당자 | 홍문규(Hong Moon-Kyu) 031-299-6764 |
장비용도 | |
Elemental and molecular chemical analysis of surface | |
기본사양 | |
1. High reflection TOF analyzer 2. UHV analysis chamber and Fast entry air lock 3. Bi cluster ion source 4. O2 and Cs dual source for Depth profiling 5. A motorized five-axes UHV sample stage 6. Two CCD high resolution video cameras 7. Secondary electron detector for SEM imaging 8. High secondary ion transmission with high mass resolution |