[LECTURE] 나노융복합산업기술(12/6 15:00), 한국기계연구원 조현민 박사
- SAINT
- Hit499
- 2024-12-05
12/6(금) 나노융복합산업기술 특강은 한국기계연구원 조현민 박사님을 모시고 진행합니다.
관심 있는 분들의 많은 참석 부탁드립니다.
-일시: 12/6(금) 15:00
-장소: 제2종합연구동 83188호
-초록: Laser-material Interaction induced Process for 2.5D and 3D Structure
Conventional lithography techniques face challenges in fabricating nano- and microscale 2.5D and 3D structures due to their reliance on step-and-repeat projection of fixed mask patterns. This limitation arises from the inherent design constraints of the lithographic process, which restrict flexibility in creating complex geometries. To achieve nano- and microscale 2.5D and 3D structures, the process fundamentally depends on how the voxel (volumetric pixel) is modulated. Voxels can be formed in 0D, 1D, or 2D configurations, serving as the building blocks for more intricate 2.5D and 3D architectures.
In this study, we introduce processes tailored to different voxel dimensions, systematically analyzing their advantages, limitations, and potential directions for further research. Additionally, to enable large-scale fabrication of 2.5D and 3D structures at the nano- and microscale, stitching techniques play a crucial role. The study delves into the alignment error analysis between printing fields, offering insights into strategies for minimizing such errors.
By exploring voxel-based modulation and stitching methodologies, this research provides a pathway to overcoming current limitations, advancing the design and manufacturing of complex nano- and microscale structures.