Focused Ion Beam 1
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| Short Name | FIB 1 |
| Model Name | SMI3050TB |
| Laboratory | 미세구조분석실//[81B104]집속이온빔(FIB) |
| maker | SII |
| Installed Year/Price | 200603 / 705,000,000 |
| Staff Name | 정효인(Jung Hyoin) 031-299-6777 |
| Main Appplication Field | |
| Circuit Edit(회로 수정), Chip Construction Analysis(Chip 구조 분석), Chip Failure Analysis(Chip 불량 분석), TEM Sample Preparation(TEM 시료 전처리) | |
| Basic Specification | |
| Triple Beam System(SEM, FIB, Ar Ion Beam), FIB Processing observed in real time by SEM, Maximum Probe Current Density : Bigger than 30A/cm2, Maximum Probe Current : 20nA | |