[SUPERUSER] Field Emission Scanning Electron Microscope
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| Short Name | [슈퍼유저용]SEM |
| Model Name | JSM-6390A |
| Laboratory | 미세구조분석실//[81B114A]초박미세절편기 |
| maker | JEOL |
| Installed Year/Price | 200712 / 130,000,000 |
| Staff Name | 박재현 031-299-6776 |
| Main Appplication Field | |
| Analysis of phase at small region for thin film and semiconductor materials needing the high resolution. 고해상도를 요구하는 박막재료, 반도체재료의 국부 영역의 상관찰 | |
| Basic Specification | |
| Resolution : 3.0 nm Magnification : 30 to 300K Image modes : SEI, BEI Accelerating voltage : 1 to 30kV EDS system (jeol system) | |