Secondary Ion Mass Spectrometer
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| Short Name | SIMS |
| Model Name | TOF-SIMS-5 |
| Laboratory | 표면분석실//[81B110]이차전자질량분석실 |
| maker | ION-TOF |
| Installed Year/Price | 200712 / 1,400,000,000 |
| Staff Name | 강수진 031-299-6764 |
| Main Appplication Field | |
| Elemental and molecular chemical analysis of surface | |
| Basic Specification | |
| 1. High reflection TOF analyzer 2. UHV analysis chamber and Fast entry air lock 3. Bi cluster ion source 4. O2 and Cs dual source for Depth profiling 5. A motorized five-axes UHV sample stage 6. Two CCD high resolution video cameras 7. Secondary electron detector for SEM imaging 8. High secondary ion transmission with high mass resolution | |