Mask Aligner
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| Short Name | Mask Aligner |
| Model Name | MA/BA6 |
| Laboratory | 표면분석실//제2공학관 25202호 |
| maker | SUSS MicroTec |
| Installed Year/Price | 201511 / 0 |
| Staff Name | 장태훈 031-299-6737 |
| Main Appplication Field | |
| Mask Alignment for semiconductor | |
| Basic Specification | |
| -SUSS MicroTec, MA/BA6 -사용료: 샘플당 30,000원(교내) | |