집속이온빔장치2 (FIB2)
| 사진 |
 |
|---|---|
| 영문명/단축명 | Focused Ion Beam 2 / FIB2 |
| 모델명 |
JIB-4601F |
| 설치장소 | 미세구조분석실 / [81B104]집속이온빔(FIB) |
| 제작사 | JEOL.LTD. |
| 도입년도/가격 | 2013.5월 / 1,250,000,000원 |
| 담당자 / 연락처 / e-mail | 김영미(Kim Youngmi) / 031-299-6729 / mistym@skku.edu |
♦ Features
• low-vacuum mode enables SEM observation without any coating of insulating material, so it can be used in almost any field
• The FIB can be used for fine milling and TEM thin-film sample preparation
• 3-dimensional images can be reconstructed to provide a better understanding of the internal structure of the specimen
♦ Specification
• Ion source : Ga liquid metal ion source
• Accelerating voltages : 1 to 30 kV (in 5 kV steps)
• Image resolution : 5 nm (at 30 kV)
• Beam current : Up to 60 nA (at 30 kV)