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분석실 안내

연구장비 소개

분석실 안내

연구장비 소개

집속이온빔장치2 (FIB2)

구면수차보정투과전자현미경3
사진
영문명/단축명 Focused Ion Beam 2 / FIB2
모델명

JIB-4601F

설치장소 미세구조분석실 / [81B104]집속이온빔(FIB)
제작사 JEOL.LTD.
도입년도/가격 2013.5월 / 1,250,000,000원 
담당자 / 연락처 / e-mail 김영미(Kim Youngmi) / 031-299-6729 / mistym@skku.edu

 

♦ Features

 

• low-vacuum mode enables SEM observation without any coating of insulating material, so it can be used in almost any field

• The FIB can be used for fine milling and TEM thin-film sample preparation

• 3-dimensional images can be reconstructed to provide a better understanding of the internal structure of the specimen 

 

♦ Specification

 

• Ion source : Ga liquid metal ion source

• Accelerating voltages : 1 to 30 kV (in 5 kV steps)

• Image resolution : 5 nm (at 30 kV)

• Beam current : Up to 60 nA (at 30 kV)