열전계방사형주사전자현미경2(JSM7000F)
| 사진 |
 |
|---|---|
| 영문명/단축명 | Field Emission Scanning Electron Microscope 2 (EDS)/FESEM 2 (EDS) |
| 모델명 | JSM7000F |
| 설치장소 | 미세구조분석실//[81B101]주사전자현미경실Ⅱ,Ⅳ |
| 제작사 | JEOL |
| 도입년도/가격 | 2004년 8월/452,497,910원 |
| 담당자/연락처/e-mail | 신나라 / 031-299-6730 / merryshin@skku.edu |
♦ Specification
• Resolution in analysis
- 3 nm(at accelerating voltage 15Kv, probe current 5nA and WD 10mm)
• Resolution of secondary electron image(SEI)
- 1.2nm guaranteed(at accelerating voltage 15kV)
- 3.0nm guaranteed(at accelerating voltage 1kV)
• Image modes
- SEI(Secondary electron image)
- COMPO(Backscattered electron image in the composition mode)
- TOPO(Backscattered electron image in the topography image mode)
• Accelerating voltage(Acc. V.)
- 0.5 to 30 Kv (10V steps for 0.5 to 2.9Kv)/ 100V steps for 2.9 to 30 Kv)