열전계주사전자현미경4(SEM4)
| 사진 |
 |
|---|---|
| 영문명/단축명 | Field Emission Scanning Electron Microscope 4 (EDS)/FESEM 4 (EDS) |
| 모델명 | JSM-7600F |
| 설치장소 | 미세구조분석실 / [81B101]주사전자현미경실Ⅱ,Ⅳ / hjjo@skku.edu |
| 제작사 | JEOL |
| 도입년도/가격 | 2011년 4월/468,404,015원 |
| 담당자/연락처 | 김순섭 / 031-299-6776 / miny06@skku.edu |
♦ Features
• Ultrahigh resolution comparable to the cold cathode FE-SEM
• In-Lens Thermal FEG
• Aperture angle control lens automatically optimizes the spot size at both high and low currents for both analysis and imaging
• High probe current up to 200 nA (at 15 kV) for various analytical purposes (WDS, EDS, EBSD, CL, etc.)
• Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images
• Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression
• Eco design for energy conservation
• SDD type Energy Dispersive X-Ray Spectrometer (EDS)
♦ Specification
• Resolution
- 1.5nm guaranteed at 1kv in GB mode
- 1.0nm guaranteed at 15kV