구면수차보정투과전자현미경3 (HRTEM3)
| 사진 |
 |
|---|---|
| 영문명/단축명 | Cs corrected Scanning Transmission Electron Microscope / HRTEM 3 (Cs_corrected/STEM/EDS/EELS) |
| 모델명 |
JEM ARM 200F / Elite T 1071(EDS) |
| 설치장소 | 미세구조분석실 / [82104]TEM lab.3 |
| 제작사 | JEOL |
| 도입년도/가격 | 2011.9월 / 3,512,292,000원 |
| 담당자/연락처/e-mail | 송지호(Song Ji-ho) / 031-299-6734 / anne77@skku.edu |
♦ Features
• STEM(HAADF) Resolution with Cs corrector
- The JEM-ARM200F, incorporating a STEM Cs corrector and a microscope column with dramatically improved mechanical and electrical stability, achieves the world's highest STEM(HAADF) resolution of 0.08 nm as a commercial TEM
• Improved Electrical Stability
- The JEM-ARM200F reduces relevant fluctuations, down to one-half compared with those for conventional TEMs, dramatically improving electrical stability
- Accelerating voltage stability ≤1ppm/min
- Objective lens current stability ≤ 0.5ppm/min
♦ Additional Options
• Energy Dispersive X-Ray Spectrometer (EDS)
- Resolution : 127 eV@Mn Kα < 55 eV@C K
- Detector : Silicon drift detector (SDD)
- Detection Range : Be to Am
• Electron energy-loss spectrometer (EELS)
• CCD camera
♦ Specification
• Resolution
- TEM: 0.19nm(point) 0.10(lattice)
- STEM: 0.14nm(BF) 0.08nm(DF)
• Magnification
- TEM: x50 - x2,000,000
- STEM: x200 - x150,000,000
• Electron gun
- Schottky field emission gun
- Accelerating voltage: 80 - 200kV
♦ Application Data
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