3차원형상측정레이저공초점현미경 (3D LSM)
| 사진 |
 |
|---|---|
| 영문명/단축명 |
Stylus Profiler / 3D LSM |
| 모델명 |
OLS5100 |
| 설치장소 | 표면분석실 / [81B110]이차전자질량분석실 |
| 제작사 | OLYMPUS |
| 도입년도/가격 | 2021.2월 / 90,200,000원 |
| 담당자/연락처/e-mail | 홍문규(Hong Moon-Kyu) / 031-299-6764 / hmkdream@skku.edu |
♦ Features
• Line roughness measurement
• Areal roughness measurement
• One-click automatic correction
• Area/volume measurement
• Histogram analysis
• Sphere/cylinder/surface angle analysis
• Automatic particle analysis
• CAD data output
♦ Specification
• Total magnification 54x–17,280x
• Field of view 16 µm–5,120 µ
• Optical system
- Reflection-type confocal laser scanning laser microscope
- Reflection-type confocal laser scanning laser-DIC microscope
- Color
- Color-DIC
• Light receiving element
- Laser: Photomultiplier (2ch)
- Color: CMOS color camera
• Height Measurement Specification
- Display resolution: 0.5 nm
- Dynamic range: 16 bits
- Repeatability: 5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm
- Accuracy: 0.15 + L/100 μm (L: Measuring length [μm])
- Accuracy for stitched image 10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm
- Measurement noise (Sq noise): 1 nm [Typ]
• Width Measurement Specification
- Display resolution: 1 nm
- Repeatability: 5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm
- Accuracy: Measurement value +/- 1.5%
- Accuracy for stitched image: 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm
♦ Application Data
• Line Profile:수직, 수평, 자유방향 Single Scan으로 재료표면에서의 단차를 측정
• Rouhness: 3D 표면 전체 및 부분에서의 표면 거칠기 측정
• 표면적 및 체적측정: 3D 표면 전체 및 부분에서의 표면적과 체적을 측정
