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연구장비 소개

분석실 안내

연구장비 소개

3차원형상측정레이저공초점현미경 (3D LSM)

3차원형상측정레이저공초점현미경
사진
영문명/단축명

Stylus Profiler / 3D LSM

모델명

OLS5100

설치장소 표면분석실 / [81B110]이차전자질량분석실
제작사 OLYMPUS
도입년도/가격 2021.2월 / 90,200,000원 
담당자/연락처/e-mail 홍문규(Hong Moon-Kyu) / 031-299-6764 / hmkdream@skku.edu

 

♦ Features

 

• Line roughness measurement

• Areal roughness measurement

• One-click automatic correction

• Area/volume measurement

• Histogram analysis

• Sphere/cylinder/surface angle analysis

• Automatic particle analysis

• CAD data output 

 

♦ Specification

 

• Total magnification 54x–17,280x

• Field of view 16 µm–5,120 µ

• Optical system

- Reflection-type confocal laser scanning laser microscope

- Reflection-type confocal laser scanning laser-DIC microscope

- Color

- Color-DIC

• Light receiving element

- Laser: Photomultiplier (2ch)

- Color: CMOS color camera

• Height Measurement Specification

- Display resolution: 0.5 nm

- Dynamic range: 16 bits

- Repeatability: 5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm

- Accuracy: 0.15 + L/100 μm (L: Measuring length [μm])

- Accuracy for stitched image 10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm

- Measurement noise (Sq noise): 1 nm [Typ]

• Width Measurement Specification

- Display resolution: 1 nm

- Repeatability: 5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm

- Accuracy: Measurement value +/- 1.5%

- Accuracy for stitched image: 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm 

 

♦ Application Data

 

• Line Profile:수직, 수평, 자유방향 Single Scan으로 재료표면에서의 단차를 측정

 

• Rouhness: 3D 표면 전체 및 부분에서의 표면 거칠기 측정

 

• 표면적 및 체적측정: 3D 표면 전체 및 부분에서의 표면적과 체적을 측정