이차이온질량분석기 (SIMS)
| 사진 |
 |
|---|---|
| 영문명/단축명 |
Time-of-Flight Secondary Ion Mass Spectrometer / SIMS |
| 모델명 |
TOF-SIMS-5 |
| 설치장소 | 표면분석실 / [81B110]이차전자질량분석실 |
| 제작사 | ION-TOF |
| 도입년도/가격 | 2007.12월 / 1,400,000,000원 |
| 담당자/연락처/e-mail | 홍문규(Hong Moon-Kyu) / 031-299-6764 / hmkdream@skku.edu |
♦ Features
• High mass resolution mass spectrum and high spatial resolution mass spectral imaging
• Dual beam depth profiling
• Oxygen and other gas flood for ion yield enhancement
• CCD high resolution cameras to allow location of region to be analyzed
• Low energy electron gun for charge compensation
• Cryogenic and heating capability in introduction and analytical chamber
• S/W: SurfaceLab 6.0
♦ Specification
• Ion Gun: Bi+, Bi3, Bi3++, Cs+, O+
• Mass Analyzer: ION-TOF reflectron energy compensating TOF mass analyzer with approximately 2 meter path length
• Mass Range: 0-10,000 amu
• Pulse Width < 1ns Bunched
• Spartial Resolution < 300nm
• Beam Energy: until 25kV for Bi+
• Electron gun for charge neutralization
• Stage: X, Y, Z
♦ Application Data
• 표면분석: 표면 내 존재하는 이온(원소, 분자)의 종류
• 2D Mapping: 2D 공간 내 이온의 분포
• 깊이분석: 깊이 방향으로의 이온변화
• 3D Mapping: 3D 공간 내 이온의 분포
