Processing equipment
-
Mask Aligner -
RF&DC Magnetron Sputtering System -
PECVD -
E-beam evaporator -
Thermal evaporator -
Ion Beam Assisted Deposition -
High Resolution sputter coater for FE-SEM -
ICP Etcher -
Reactive ion etcher -
Atomic Layer Etching System -
Neutral beam etching system -
Annealing system -
Dry oven -
Spin coater
Analysis Equipment
-
8-inch probe station
-
Field Emission Scanning
Electron Microscope -
UV/VIS
Spectrophotometer -
Fluorescence
spectrometer -
Micro-Raman
spectrometer -
Small Angle
X-ray Diffractometer -
AFM -
Scanning Mobility
Particle Sizer(SMPS) -
Wafer Surface Scanner -
Surface profilometer