Processing equipment
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Mask Aligner
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RF&DC Magnetron Sputtering System
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PECVD
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E-beam evaporator
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Thermal evaporator
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Ion Beam Assisted Deposition
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High Resolution sputter coater for FE-SEM
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ICP Etcher
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Reactive ion etcher
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Atomic Layer Etching System
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Neutral beam etching system
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Annealing system
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Dry oven
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Spin coater
Analysis Equipment
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8-inch probe station
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Field Emission Scanning
Electron Microscope -
UV/VIS
Spectrophotometer -
Fluorescence
spectrometer -
Micro-Raman
spectrometer -
Small Angle
X-ray Diffractometer -
AFM
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Scanning Mobility
Particle Sizer(SMPS) -
Wafer Surface Scanner
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Surface profilometer