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Main Research Field

Nano Mechatronics

  • Our research focuses on fundamental studies of CNT & nanoparticles and their applications.
  • Fundamental studies include manipulation of CNT, nanoparticle manufacturing, and nanosimulation.
  • Major applications are device, nanocomposites, CNT-bio sensor, and aerosol processing.

Particular Research

Particular Research
  • Manipulation of CNT & CNT-based chemical sensors
    • Detection of radicals and partial discharge using CNT-based chemical sensors
    • Manipulation technique of nanotubes using dielectrophoresis (DEP)
  • Bio & Environmental application of CNTs and nanoparticles
    • Evaluation of biocompatibility of CNTs and development of high sensitive bio-sensors for detecting reaction of bio-molecules
    • Monitoring of ultrafine particle at a roadside for reduction of air pollution
  • Nano Materials (nanocomposites & nanoparticles)
    • Development of nanocomposites with CNTs
    • Synthesis of Si nanoparticles using plasma & pyrolysis
    • Film & pattern formation using metal particles for IT application
  • Nanosimulation
    • Immersed Finite Element Method, Multi-scale Simulation
    • Modeling of nanoparticle formation & transport
  • Contamination control
    • Evaluation of 45 nm level megasonic cleaning system
    • Development of nanoparticle measuring equipment
Particular Research
  • Development of high sensitive CNT-based chemical sensors
    • Single-walled carbon nanotubes (SWNTs) have optimal characteristics as sensor elements such as large surface-to-volume ratios, one dimensional electronic structure and a molecular composition consisting of only surface atoms.
    • Fast conductance modulation of the SWNT matt in response to neutralized fluorine radicals is observed.
  • Manipulation techniques of CNT using dielectrophoresis method
    • Dielectrophoresis has received considerable attention for separating nanotubes according to electronic types.
    • Positive dielectrophoresis (toward the electrodes) is observed for metallic SWNT due to the large dielectric constant.
Particular Research
  • Development of nanocomposites
    • Development of electrically improved metal paste by functionalized carbon nanotubes.
    • Development of Cu & Al nanocomposite reinforced with carbon nanotubes
  • Nanoparticels synthesis & appliaction
    • Si nanoparticle generation using pulse plasma technology & 2 stage pyrolysis
    • Via hole filling & film formation using metal particles
    • Nanocomposite film treatment using CMP
Particular Research
  • Immersed Finite Element Method
    • A Lagrangian solid interaction force vectorinto the N-S equation using a meshfree method
    • Coupling with Electro-mechanics to model electric field guided CNTs assembly
  • Multi-scale Simulation
    • meso-, micro- & nano- level behavior within continuum models
    • Interdisciplinary nature of multiscale methods
  • Modeling of Nanoparticle Formation and Transport
    • Coupling between aerosol dynamics & chemical kinetics model for particle formation
    • Particle transport during semiconductor & display process.
Particular Research
  • Evaluation of 45nm-level megasonic cleaning system
    • Study the origin of pattern damage and design the megasonic with damage-free
    • Optimize the megasonic cleaning process to enhance the cleaning efficiency
  • Development of nanoparticle measuring equipment
    • Development of particle beam mass spectroscopy (PBMS)
    • Development of particle measurement equipment using light scattering
    • Development of low pressure differential mobility