- 예약 방법: [장비별 예약(캘린더 확인)] → [장비별 예약 신청] → [슈퍼유저 승인/반려 메일 확인] → [장비 사용]
- 사용 방법: [장비 예약 완료] → [연구실별 카드 지참] → [장비 사용 시 카드 태그(전원 ON)] → [장비 사용 후 카드 태그(전원 OFF)]
- 클린룸 사용 시 Bench Fee (월/인 20,000원) 별도 부과
- 1. Reservation Procedure: [Check Equipment Reservation Calendar] → [Submit Equipment Reservation Survey] → [Check approval/rejection email] → [Use the equipment]
- 2. Usage Procedure: [Complete Equipment Reservation] → [Tag the card when using the equipment (Power ON)] → [Tag the card after using the equipment (Power OFF)]
- 3. Cleanroom Bench Fee: 20,000 won per person per month (Tag the card every entry & exit)
| Place | Equipment name | Hourly rate ( won / caculated 10-minute increments) | Super User | 1. Check Equipment Reservation Calendar |
2. Submit equipment-specific reservation Survey (approval/rejection email will be given) |
|||
|---|---|---|---|---|---|---|---|---|
| SAINT Full-time prof. | Adjuct prof. | Non-SAINT prof. | ||||||
|
83101 (SAINT Cleanroom) |
Cleanroom Bench Fee | 20,000 won / person / month | 김민재 | minsung2791@gmail.com | ||||
| Mask Aligner 2 | 12,000 | 24,000 | 36,000 | 이상민 | tkdalsqnrud@g.skku.edu |
 |
 |
|
| E-beam Evaporator 1 | 12,000 | 24,000 | 36,000 | 신호성 | shs98753@gmail.com |
|
|
|
| E-beam Evaporator 2 | 12,000 | 24,000 | 36,000 |
신호성 |
|
|
||
| 이나영 | lny740531@gmail.com | |||||||
| Thermal Evaporator | 12,000 | 24,000 | 36,000 | 김민재 | minsung2791@gmail.com |
|
|
|
| Organic vapor deposition system(유기증착기) | 12,000 | 24,000 | 36,000 | 박진수 | jinsoo410@gmail.com |
|
|
|
| Spin coater | 6,000 | 12,000 | 18,000 | 김민재 | minsung2791@gmail.com |
|
|
|
|
83113 (나노계측실험실) |
FE-SEM(+normal SEM), EDX, Metal Coater | 12,000 | 24,000 | 36,000 | 이광희 | lighthlee@gmail.com |
|
|
| Contact Angle | 6,000 | 12,000 | 18,000 | 지수근 | jisugeun1325@gmail.com |
|
|
|
| Ellisometry System | 12,000 | 24,000 | 36,000 | 윤태웅 | twyoon.rs@gmail.com |
|
|
|
| Raman Microscope | 18,000 | 36,000 | 54,000 | 조영훈 | joyounghoon0@gmail.com |
|
|
|
| Stress 테스터기(UTM) | 12,000 | 24,000 | 36,000 | 김호재 | d1210@skku.edu |
|
|
|
| AFM 2 | 12,000 | 24,000 | 36,000 | 최현규 | siouw12321@gmail.com |
|
|
|
|
83106/ 83110 (나노공정실험실) |
AFM 1 (with glovebox) | 24,000 | 48,000 | 72,000 | 최승구 | sg110011@g.skku.edu |
|
|
| 최대규 | daekyu@skku.edu | |||||||
| 8inch Probe station | 12,000 | 24,000 | 36,000 | 최현규 | siouw12321@gmail.com |
|
|
|
| Mini RIE plasma | 6,000 | 12,000 | 18,000 | 신호성 | shs98753@gmail.com |
|
|
|
| ICP Plasma | 12,000 | 24,000 | 36,000 | 신호성 | shs98753@gmail.com |
|
|
|
| RF & DC Magnetron sputtering system | 6,000 | 12,000 | 18,000 | 정인희 | jeonginhee251@gmail.com |
|
|
|
| RTA | 12,000 | 24,000 | 36,000 | 최현규 | siouw12321@gmail.com |
|
|
|
| TGA/DSC(동시시차열중량분석기) | 12,000 | 24,000 | 36,000 | 김기용 | okky1996@gmail.com |
|
|
|